HANDBOOK OF SCIENTIFIC AND TECHNICAL SOCIETIES AND INSTITUTIONS OF THE UNITED STATES AND CANADA 1927
PUBLISHED BY THE NATIONAL RESEARCH COUNCIL OF THE NATIONAL ACADEMY OF SCIENCES WASHINGTON1927 年出版304 页ISBN：
FOUNDATIONS OF MEMS SECOND EDITION
CHANG LIU2011 年出版576 页ISBN：7111358279
本书全面论述了微机电系统（MEMS）的基础知识，涵盖了MEMS技术的主要方面，同时引用了经典的MEMS研究论文和前沿的研究论文，为学生深入学习MEMS技术提供了指引。书中提炼出了四个典型的传感器实例：惯性传感器、压力传...
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