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本书是美国斯坦福大学电气工程系“硅超大规模集成电路制造工艺”课程所使用的教材，该课程是为电子工程系微电子学专业的四年级本科生及一年级研究生开的一门专业课。本书最大的特点是，不仅详细介绍了与硅超大...
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