MEMS and Nanotechnology-Based Sensors and Devices for Communications
Medical and Aerospace Applications2008 年出版401 页ISBN：
FUNDAMENTALS OF MICROFABRICATION AND NANOTECHNOLOGY VOLUME 3 FROM MEMS TO BIO-MEMS AND BIO-NEMS THIR
MARC J.MADOU2012 年出版636 页ISBN：9781420055160
The MEMS Handbook Second Edition MEMS Design and Fabrication
Mohamed Gad-el-Hak2006 年出版643 页ISBN：
The MEMS Handbook Second Edition MEMS Introduction and fundamentals
Mohamed Gad-el-Hak2006 年出版469 页ISBN：
Materials and failures in MEMS and NEMS
Atul Tiwari ; Baldev Raj2015 年出版406 页ISBN：1119083605
