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本书全面论述了微机电系统(MEMS)的基础知识,涵盖了MEMS技术的主要方面,同时引用了经典的MEMS研究论文和前沿的研究论文,为学生深入学习MEMS技术提供了指引。书中提炼出了四个典型的传感器实例:惯性传感器、压力传...
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