THE SCIENCE AND ENGINEERING OF MICROELECTRONIC FABRICATION SECOND EDOITON
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本书系统地介绍了微电子制造科学原理与工程技术，覆盖了集成电路制造所涉及的所有基本单项工艺，包括光刻、等离子体和反应离子刻蚀、离子注入、扩散、氧化、蒸发、气相外延生长、溅射和化学气相淀积等。对每一...
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PATTI J.MARINELLI LIZETTE MUJICA LAUGHLIN1994 年出版372 页ISBN：083844296X
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JUNG H.CHOL AND MARK E.MCCALLUM2014 年出版504 页ISBN：1464150923
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