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Guilong zhu，Jiangning Wu，Wei Han2008 年出版419 页ISBN：9787562327448
本论文集收集第四届亚太国际知识管理年会暨第九届国际知识与系统科学学术年会的68篇优秀论文。论文涉及知识网络、知识处理、企业知识管理、决策支持及知识系统工程等领域，作者来自20多个国家与地区，反映了这...
THE SCIENCE AND ENGINEERING OF MICROELECTRONIC FABRICATION SECOND EDOITON
（美）STEPHEN A.CAMPBELL著2003 年出版603 页ISBN：7505386263
本书系统地介绍了微电子制造科学原理与工程技术，覆盖了集成电路制造所涉及的所有基本单项工艺，包括光刻、等离子体和反应离子刻蚀、离子注入、扩散、氧化、蒸发、气相外延生长、溅射和化学气相淀积等。对每一...
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